CORDIS Project
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This project seeks to create flexible integration methods for micro- and nanosystems, focusing on combining various materials and manufacturing techniques. It aims to optimize production processes for microelectromechanical systems (MEMS) to meet diverse market needs efficiently.
This proposal targets the development of flexible heterogeneous integration schemes for combining best-of-class materials, components and manufacturing methods into economically viable micro- and nanosystem (MEMS) solutions.Today, the IC industry drives the development of most micro- and nanofabrication technologies, which are characterized by standardized processes, very large production volumes of >10.000 wafers/month and enormous capital investments.
In contrast, the vast majority of MEMS dem…
KUNGLIGA TEKNISKA HOEGSKOLAN
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