CORDIS Project
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This project aims to develop a solvent-free method for depositing metal-organic frameworks (MOFs) to integrate them into microelectronics. By using chemical vapor deposition, it seeks to create tailored nano-environments for applications such as sensors and solid electrolytes.
Metal-organic frameworks (MOFs) are crystalline solids with highly regular pores in the nanometer range.
The possibility to create a tailored nano-environment inside the MOF pores makes these materials high-potential candidates for integration with microelectronics, e.g. as sensor coatings, solid electrolytes, etc.
However, current solvent-based methods for MOF film deposition, a key enabling step in device integration, are incompatible with microelectronics fabrication because of contamination…
KATHOLIEKE UNIVERSITEIT LEUVEN
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