CORDIS Project
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This project focuses on the integration of metal-organic frameworks (MOFs) with microelectronics through a novel chemical vapor deposition technique. It aims to develop MOF coatings for applications in efficient lighting and detection of volatile organic compounds.
Metal-organic frameworks (MOFs) are crystalline solids with highly regular pores in the nanometre range.
Because of their unique properties, MOFs are high-potential candidates for integration with microelectronics.
However, current methods for MOF film deposition, a key enabling step in device integration, are incompatible with microelectronics fabrication because of contamination and corrosion issues.The VAPOMOF host group very recently demonstrated the deposition of MOFs via chemical vapour de…
KATHOLIEKE UNIVERSITEIT LEUVEN
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