CORDIS Project
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This project develops a super-resolution microscopy technique that uses high-harmonic generation in semiconductors, allowing imaging below 100 nanometers without the need for fluorescent labeling. It aims to enhance quality inspection processes in semiconductor manufacturing.
Super-resolution microscopy has revolutionized imaging by breaking what was believed to be unbreakable: the diffraction limit which determines what a microscope can resolve.
However, many disciplines in science and engineering cannot benefit from super-resolution microscopy, because practically all current super-resolution microscopes require fluorescence, often introduced by labelling that is chemically modifying the samples of interest.
The semiconductor industry is the driver of digitizati…
STICHTING NEDERLANDSE WETENSCHAPPELIJK ONDERZOEK INSTITUTEN
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