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Excillum is developing the MetalJet, a high-brightness microfocus X-ray source that significantly enhances X-ray intensity for various applications. This innovation targets the semiconductor industry, particularly for advanced metrology solutions.
Excillum is an award-winning pioneer in the field of high-end X-ray sources.
Hans Hertz and Oscar Hemberg of the Royal Institute of Technology (KTH) in Stockholm, founded Excillum in 2008.
Excillum designs, develops and manufactures a high brightness microfocus X-ray source based on Hertz and Hemburg’s invention.
This unique patented technology, MetalJet, is the most fundamental advance in X-ray tube technology since the rotating anode was introduced in 1929, as it can reach previously unprecede…
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