CORDIS Project
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This project focuses on improving the quality and yield of nanoelectronics production by developing techniques to manage process variations and doping fluctuations. It aims to enhance circuit design through multi-objective optimization and statistical analysis, fostering collaboration between academia and industry.
Cost control, production efficiency, cycle time and yield are critical quality benchmark for nanoelectronics productions.
An increasingly important downside of nano-CMOS technology scaling is the fact that the scaling of feature sizes cannot be accompanied by a suitable scaling of geometric tolerances.In addition, when getting into deep miniaturized dimensions, phenomena like edges or surfaces roughness, or the fluctuation of the number of doping atoms within the channels are becoming increasing…
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