CORDIS Project
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The project is developing a lossless electron beam monochromator to enhance the resolution of electron microscopy. This innovative technology aims to reduce energy loss in electron beams, making high-resolution imaging more accessible and effective for applications in semiconductor inspection and medical research.
Lossless Electron Beam Monochromator for Enhanced Resolution in Electron MicroscopyThe performance of advanced high-resolution electron-microscopes (EM) is severely limited by the energy spread of the electron beam, which limits both spatial and spectral resolutions by causing chromatic aberrations.
To mitigate this limitation, monochromators are used.
Common monochromators have mechanical slits as a narrow band-pass filter, inherently introducing high loss to the electron beam.
They are very co…
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