CORDIS Project
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This project explores the use of heterometallic cyclic coordination compounds in lithography and quantum computing. It aims to develop materials for advanced lithography techniques and investigate their potential as qubits in quantum information processing.
The proposal is to use our great synthetic control to examine the use of heterometallic cyclic coordination compounds (heterometallic rings, HRs) in two distinct application areas.
One is of immediate impact: the use of the HRs as resist materials for lithography.
This work has already been patented and is being developed as a means to fabricate devices that will be needed at the 7 nm node and smaller.
The synthetic control also means we can make resists for extreme UV lithography (13 nm wavelen…
THE UNIVERSITY OF MANCHESTER
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