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Nova Fabrica has created the INTELEG® S HF, a gas analysis system for monitoring vacuum-based processes. This innovative solution provides reliable gas composition data across a wide pressure range, addressing current market limitations and enhancing production quality.
The fast growing thin and ultra-thin film industries largely rely on modern vacuum-based processes, which often exhibit fast and slow process gas composition changes and drifts.
Such changes are undesirable and can result in reproducibility and product quality issues.
Various control strategies, relying on proper monitoring systems (such as Gas Analysis Systems [GAS]), can be employed to stabilise production processes at the desired working point by regulating gas flow and thus adjusting gas com…
UAB NOVA FABRICA
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