CORDIS Project
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The E450LMDAP project aims to develop tools and modules for 450 mm lithography and metrology, facilitating the transition to larger wafer sizes in semiconductor manufacturing. It includes pilot line activities to validate these technologies.
The overall goal of the E450LMDAP project is to develop 450 mm lithography and metrology modules and tools and to initiate distributed pilot line activities over the 450 mm lithography and metrology tool platform eco system.
These pilot line activities will go down to the pilot lines of the lithography tool and the related (sub-)systems and components supply chain and metrology tool suppliers.
In addition, also early 1x node patterning module qualification at the imec’s pilot line will be part o…
Partner organizations (coordinator is shown above), with normalized type and CORDIS activity type. Guests see up to 4 partners.
Netherlands
Type: Company (for-profit)
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
France, Annecy
Type: Company (for-profit)
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
SME: No
Israel, Rehovot
Type: Company (for-profit)
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
SME: No
Germany, Dresden
Type: Company (for-profit)
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
SME: No
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