CORDIS Project
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The CopPeR project aims to develop a new copper deposition process using non-aqueous solvents to improve interconnect formation in semiconductor devices. This innovative approach seeks to enhance the quality of copper metallization, enabling better performance in devices smaller than 32 nm.
The CopPeR project will provide a novel copper deposition process based on the useof non-aqueous solvents to overcome the limitations of currently employedinterconnect formation processes enabling device scaling beyond the 32 nmtechnology node.
This non-aqueous process will open novel routes to implementdirect on barrier plating, focussing on tantalum and ruthenium as diffusion barriers.As another main advantage the process developed and implemented within theCopPeR project will significantly im…
TECHNIKON FORSCHUNGS- UND PLANUNGSGESELLSCHAFT MBH
Partner organizations (coordinator is shown above), with normalized type and CORDIS activity type. Guests see up to 4 partners.
Austria, Villach
Type: Company (for-profit)
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
SME: No
Austria, Graz
Type: University / higher education
Activity type: Higher or Secondary Education Establishments
SME: No
Belgium, Wijgmaal
Type: SME
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
SME: Yes
Belgium, Leuven
Type: University / higher education
Activity type: Higher or Secondary Education Establishments
SME: No
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