CORDIS Project
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This project focuses on advancing Atom Probe Tomography (APT) for analyzing semiconductor nanostructures. It aims to improve the technique's accuracy and reliability, addressing challenges in the semiconductor industry related to 3D device architecture.
This proposal presents a training-by-research plan in the emerging and exciting field of Atom Probe Tomography (APT) and its application in analysing non planar atomic scale state-of-the art semiconductor nanostructures.
Central to this project are the metrology and training advances needed to underpin the next generation of 3 dimensional (3D) device architectures based on atomically engineered materials and interfaces (e.g.
FinFETs such as the Tri-gate transistor ).
Amongst the possible emergi…
INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
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